the er-c
fei helios nanolab 460f1 @ er-c

The FEI Helios NanoLab 460F1 is a highly advanced dual beam FIB-SEM platform for imaging and analytical measurements, transmission electron microscopy (TEM) sample and atom probe (AP) needle preparation, process development and process control. For these purposes, the FEI Helios NanoLab 460F1 combines an Elstar UC technology electron column for high-resolution and high material contrast imaging with the high-performance Tomahawk ion column for fast and precise sample preparation. The FEI Helios NanoLab 460F1 is additionally equipped with the MultiChemTM gas delivery system, an EasyLift nanomanipulator, a cooling trap, an inert gas transfer (IGT) holder loadlock, a quick loader, a FlipStage 3, an EDX-System and an STEM III detector. This instrument is one of the few dual beam systems which combine an IGT holder loadlock with a FlipStage 3+ Easy-Lift nanomanipulator.

The configuration of the FEI Helios NanoLab 460F1 allows a variety of advanced imaging and preparation techniques to be applied to various solid state materials. These techniques include TEM sample preparation (normal- and backside milling) without breaking the vacuum (with Flipstage 3), STEM imaging on thin TEM samples (with STEM 3 detector), slice and view operation (automatic), needle preparation for tomography, atom probe sample preparation, plan-view preparation and the preparation of lamellas on heating chips for TEM annealing experiments. Making use of the IGT-loadlock, even samples who are not allowed to be exposed to air can be prepared on any of the previously described ways.

The FEI Helios NanoLab 460F1 is not intended for the investigation of aqueous, ferromagnetic or organic samples without further discussions with both of the instruments officers and the ER-C general manager.

Microscopists planning to use this instrument should contact Max Kruth or Lidia Kibkalo.

Users of the Helios NanoLab 460F1 are kindly asked to quote a tecnical description of the instrument published in the Journal of large-scale research facilities 2 (2016) A59. when referring to the use of this instrument in publications.

The FEI Helios NanoLab 460F1 was funded by the German Federal Ministry of Education and Re-search (BMBF) via the project SABLE (SABLE-Skalenübergreifende, multi-modale 3D-Bildgebung Elektrochemischer Hochleistungskomponenten) under support code 03EK3543.

sem specifications
  • Acceleration Voltage
20 V ... 30 kV
  • SE Point Resolution @ U = 2 ... 15 kV
< 0.6 nm
  • SE Point Resolution @ U = 1 kV
< 0.7 nm
  • Probe Current @ U > 15 kV
< 100 nA
specimen stages
  • Five axis piezzo motorised
  • Fully eucentric
  • Flipstage 3 with in situ STEM 3 detector

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